LTGem Series
Semiconductor-fabrication equipment in accordance with Generic Equipment Model(GEM) is achieved by using the script that has already been defined. The interface of the manufacturing device application software and the GEM Server is done by the ActiveX component.
It is being composed by LTGem Series as follows.
- GEM Server to mount function for SECS/GEM communication on device
- GEM/SECS Simulator to do test of communication of device and host
- Message Log Viewer to analyze trace log of message sending and receiving displaying
- Message Definition Tool to do various definitions
- Script Debugger to debug script